LEXT™ OLS5100 3D Laser Scanning Microscope

The OLS5100 laser microscope, designed for failure analysis and material engineering research, combines high measurement precision and optical performance with smart tools that make the microscope simple to use. Quickly and accurately measure form and surface roughness at the submicron level to simplify your process with reliable data.


  • Guaranteed measurement accuracy*
  • Renowned Olympus optics reduce aberration to capture the correct shape of your sample throughout the entire field of view
  • Smart Lens Advisor helps you choose the right objective lens for your roughness measurement

Guaranteed Measurement Accuracy

Microscope objectives from LEXT provide extremely accurate measurement data. When used in conjunction with the Smart Lens Advisor, you can obtain reliable data that you can trust.