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The AL120-12 wafer handler is FOUP (Load Port) and FOSB compliant, making it perfect for low-cost back-end inspection. While properly transferring wafers, particularly thin and warped wafers, the safe and ergonomic design protects operator safety.
|Transfer Sequence||Top Macro Inspection, Back Macro Inspection, Micro Inspection|
|Inspection Mode||All Wafers Inspection, Sampling Inspection|
|Wafer Alignment||Non-contact Centering|
|Wafer Transfer System||Vacuum-contact Mechanical Arm System|